ASML’s PAS5000/55A, i-line wafer stepper with a 0.48NA Zeiss lens, has been the production tool for many leading 4, 5 and 6” fabs around the world for the past four decades.
The system has a “process in-depended” alignment system, for a superior production overlay. The small footprint of roughly 1m2 makes flexible placing in most existing fabs possible.